发明名称 BLOW CLEANER
摘要 PROBLEM TO BE SOLVED: To provide a blow cleaner that enables a reliable and an efficient removal of foreign matters in workpieces such as a plurality of electronic parts. SOLUTION: The blow cleaner 1 is equipped with a gas discharging section 10 having a plurality of discharge openings 11 and a workpiece holding section 20 for holding a plurality of workpieces 25 at the location against which the gas discharged from a plurality of the discharge openings 11 blows. The workpiece holding section 20 includes a tray 21 on which a plurality of workpieces 25 is disposed so that the portion to be cleaned of each workpiece 25 is opposite to each discharge opening 11 and a net-like workpiece holder 24 for holding a plurality of workpieces 25 disposed on the tray 21. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008132417(A) 申请公布日期 2008.06.12
申请号 JP20060319732 申请日期 2006.11.28
申请人 EPSON TOYOCOM CORP 发明人 YOKOUCHI YOSHIO;SEKI YOSHIYUKI
分类号 B08B11/02;B08B5/00;H01L21/304;H01L23/02 主分类号 B08B11/02
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