EMBEDDED INDUCTOR DEVICES AND FABRICATION METHODS THEREOF

摘要

Embedded inductor devices and fabrication methods thereof. An embedded inductor device includes a substrate, a conductive coil disposed on the substrate, and a patterned high-permeability (mu_r>1) magnetic layer on the substrate. The patterned high-permeability (mu_r>1) magnetic layer physically contacts the conductive coil. The conductive coil and the patterned high-permeability (mu_r>1) magnetic layer are intersected and substantially perpendicular to each other.