发明名称 |
Multilayer Wiring Structure, Semiconductor Device, Pattern Transfer Mask and Method for Manufacturing Multilayer Wiring Structure |
摘要 |
A multilayer interconnection structure according to this invention is applied to a case where a plurality of interconnections are formed at a fine pitch and a via is connected to at least one of the interconnections. In the multilayer interconnection structure, a region facing the via is locally narrowed in at least the interconnection, facing the via, of the interconnections adjacent to the interconnection connected to the via.
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申请公布号 |
US2008136043(A1) |
申请公布日期 |
2008.06.12 |
申请号 |
US20060908099 |
申请日期 |
2006.03.09 |
申请人 |
NEC CORPORATION |
发明人 |
OHTAKE HIROTO;HAYASHI YOSHIHIRO |
分类号 |
H01L21/4763;G03F1/00;G06F17/50;H01L23/48 |
主分类号 |
H01L21/4763 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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