发明名称 |
COUPLED MEMS STRUCTURE FOR MOTION AMPLIFICATION |
摘要 |
<p>A microelectromechanical structure (MEMS) device includes a secondary MEMS element displaceably coupled to a substrate. A primary MEMS element is displaceably coupled to the secondary MEMS element and has a resonant frequency substantially equal to the secondary MEMS element and has a much larger displacement than the secondary MEMS element.</p> |
申请公布号 |
WO2008039378(A3) |
申请公布日期 |
2008.06.12 |
申请号 |
WO2007US20501 |
申请日期 |
2007.09.21 |
申请人 |
CORNELL RESEARCH FOUNDATION, INC.;DESAI, SHAHYAAN |
发明人 |
DESAI, SHAHYAAN |
分类号 |
G01L1/00 |
主分类号 |
G01L1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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