Probe station for e.g. testing semiconductor substrates, has positioning system positioning substrate with respect to sensors, housing enclosing chuck and sensors to form electromagnetic shielding

摘要

The station has a chuck (5) for receiving a semiconductor substrate (7) to be tested, and a sensor holder plate (4) on which sensors for electrical contacting of the semiconductor substrate to be tested are disposed by a sensor holder. A positioning system positions the semiconductor substrate with respect to the sensors. A light-proof housing encloses the chuck and the sensors to form an electromagnetic shielding, and a signal preparation device (27) is provided within the housing. A remote interface transmits data and signals to and from an external computer.