摘要 |
PROBLEM TO BE SOLVED: To manufacture an optical element having excellent optical characteristics by removing a degeneration layer on the surface of the optical element without causing damage on the surface of the optical element. SOLUTION: After the surface degeneration layer 6 is removed in a film depositing apparatus 50 at first by irradiating the optical element 5 on which the surface degeneration layer 6 is formed in the press molding of the optical element with energy beam 56, a thin film material target 55 is irradiated with the energy beam 56 to form an desired optical film on the surface 56 of the optical element 5 by sputtering or the like and to obtain a vapor deposition lens 8. The optical film is formed without applying mechanical force such as mechanical grinding on the surface of the optical element 5 and causing damage on an optical functional surface 5a, 5b or the like of the optical element 5 to manufacture the optical element having excellent optical characteristics. COPYRIGHT: (C)2008,JPO&INPIT
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