| 摘要 |
A method for forming an alignment layer, a color filter substrate using the same, and a TFT(Thin Film Transistor) substrate using the same are provided to improve the response speed of an LCD(Liquid Crystal Display) by aligning an alignment layer through the irradiation of ion beams so that the alignment layer can have high anchoring energy. An alignment layer(20) is formed on a substrate(10). A mask, on which a slit pattern is formed, is arrayed on the substrate. Ion beams are primarily applied to the substrate so that the alignment layer can have mountains and grooves. Then ion beams are secondarily applied to the substrate. In this case, the ion beam energy in the secondary irradiation of ion beams is smaller than the ion beam energy in the primary irradiation. |
