| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate storing container capable of reducing the contact region of a retainer to a substrate and the contamination of the substrate. <P>SOLUTION: In the substrate storing container, the retainer 30 holding a semiconductor wafer W is interposed between a container body 10 capable of aligning and storing a plurality of semiconductor wafers W and a lid body 20. The retainer 30 is formed by a plurality of flexible elastic pieces 31 that are extended in the direction of the semiconductor wafer W stored in the container body 10 from the ceiling inner surface of the lid body 20 and are arranged in the alignment direction of the plurality of semiconductor wafers W and a holding groove piece 34 that is formed at the tip of each elastic piece 31 and holds the upper end of the periphery in the semiconductor wafer W in contact. The elastic piece 31 and the holding groove piece 34 are bent gradually in the direction of the semiconductor wafer W from the ceiling inner surface side of the lid body 20 to reduce the contact holding region of the holding groove piece 34 to the upper end of the periphery of the semiconductor wafer W toward the radius outer direction of the semiconductor wafer W. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
