ELECTROMECHANICAL ELEMENT, ELECTRONIC DEVICE, AND PROJECTOR

摘要

PROBLEM TO BE SOLVED: To provide a highly reliable electromechanical element which has a space layer between the two surfaces opposed to each other and in which a variation in the height of the surface of the beam supported by a support part is reduced, and also to provide an electronic device having the electromechanical element, and a projector. SOLUTION: This electromechanical element 30 comprises: the beam 35 facing a substrate 33 with a space interposed therebetween; and support parts 41 supporting the beam 35 by the end parts in the longitudinal direction. The plurality of support parts 41 are installed in the lateral direction of the beam 35. COPYRIGHT: (C)2008,JPO&INPIT