GRINDING METHOD FOR SILICON CARBIDE SINGLE CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide a grinding method for silicon carbide single crystal for easily and efficiently cutting out silicon carbide single crystal having no breakage such as crack. SOLUTION: This grinding method comprises a process for bringing a grindstone working part 32 of a grinding wheel 30 into contact with a growth face opposing to a seed crystal 11 side of the silicon carbide single crystal 10 formed by the sublimation method, and a process for grinding the silicon carbide single crystal 10 by rotating the grinding wheel 30 and lowering the grinding wheel 30 in the direction of seed crystal 11. Ultrasonic vibration is given to the hollow cylindrical grinding wheel 30 or a fixed device 21 to discharge facet pieces of the silicon carbide single crystal 10 in the process for grinding the silicon carbide single crystal 10. COPYRIGHT: (C)2008,JPO&INPIT