| 摘要 |
PURPOSE: A disc type pedestal of an ion implantation device is provided to restrain a wafer from being dropped out of a handler due to the residues of photoresist by using support pins. CONSTITUTION: A disc type pedestal of an ion implantation device is provided with a body(12) and a plurality of screw grooves(14) in the body. The disc type pedestal further includes a plurality of support pins(16) inserted into the screw grooves for spacing a wafer away from the body. The support pins are equally spaced apart from each other on the body. Each support pin has a screw portion for exactly gearing into the screw groove. |
