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发明名称
Mehrschichtige Scheibe mit dicker Opferschicht unter Verwendung von porösem Silizium oder porösem Siliziumdioxid und Herstellungsverfahren
摘要
申请公布号
DE60038711(D1)
申请公布日期
2008.06.12
申请号
DE20006038711
申请日期
2000.03.27
申请人
SAMSUNG ELECTRONICS CO. LTD.
发明人
KANG, SUNG-GYU;LEE, KI BANG;CHOI, JAE-JOON;JEONG, HEE-MOON
分类号
H01L21/205;H01L21/3063;B81C1/00;G01P15/08;H01L21/02;H01L21/20;H01L21/316;H01L21/762;H01L21/768;H01L27/12
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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