发明名称 RESIST, MANUFACTURING METHOD OF STAMPER FOR OPTICAL DISK USING THE SAME AND STAMPER FOR OPTICAL DISK
摘要 <P>PROBLEM TO BE SOLVED: To easily and stably provide a stamper for an optical disk whose surface has low roughness and is smooth. <P>SOLUTION: A resist is used, composed of an inorganic material containing an oxide of a transition metal and an added metal element having a melting point lower than that of the oxide of the transition metal. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008135090(A) 申请公布日期 2008.06.12
申请号 JP20060318614 申请日期 2006.11.27
申请人 CANON INC 发明人 MIYAKOSHI TOSHIMORI
分类号 G11B7/26;G03F7/004;H01L21/027 主分类号 G11B7/26
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