发明名称 MANUFACTURING METHOD OF PACKAGE SUBSTRATE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a package substrate capable of inhibiting degradation in electric characteristics. <P>SOLUTION: A manufacturing method of the package substrate includes a first step of respectively forming a plurality of ball pads 12 at equal intervals on a substrate 11a and forming a plurality of signal lines 13 connected with the plurality of formed ball pads, a second step of forming an interconnection line 17 on a cavity forming part LN22, respectively forming a plurality of plating line 15a connected from one end of the plurality of signal lines to the interconnection line and forming a current supply line 14a from one arbitrary ball pad toward the outer periphery of the substrate, a third step of electroplating the plurality of signal lines by supplying current from the current supply line, and a fourth step of cutting the outer periphery of the substrate by LN21, working an outline of the substrate and removing the cavity forming part to work a cavity. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2008135497(A) 申请公布日期 2008.06.12
申请号 JP20060319647 申请日期 2006.11.28
申请人 YOKOGAWA ELECTRIC CORP 发明人 IWASAKI MASATO
分类号 H01L23/12 主分类号 H01L23/12
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