MANUFACTURING METHOD OF LAYERED PRODUCT FOR HARD DISC DRIVE (HDD)SUSPENSION

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a layered product for a hard disk drive (HDD) suspension omitting complication of a working step and suitable for an inexpensive working method by which copper wiring lines can be finely worked. SOLUTION: The manufacturing method of the layered product for the HDD suspension includes: (a) applying a solution of a polyimide based resin solution or a solution of a precursor of the polyimide based resin on a stainless layer A and drying and thermally treating the solution to form an insulating resin layer B comprising a plurality of polyimide based resin layers and having 1×10-5to 3×10-5/°C linear expansion coefficient; (b) a step for depositing a first seed layer C as a metal thin film by a sputtering method on the resin layer B; (c) a step for depositing a second seed layer D as a metal thin film having satisfactory conductivity by a sputtering method on the first seed layer C; and (d) a step for forming a plating layer E to be a conductive layer on the second seed layer D. COPYRIGHT: (C)2008,JPO&INPIT