FILM FORMING APPARATUS, FILM FORMING SYSTEM, FILM FORMING METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE OR ORGANIC ELECTROLUMINESCENCE ELEMENT

摘要

Provided are a film forming apparatus by which an expensive organic EL material can be used without wasting it and an organic EL film can be uniformly formed over a long period of time, and a jig for such film forming device. A single material container section is provided with a plurality of blow out containers. A switching device is provided for switching a piping system, which vaporizes the organic EL material in the material container section and supplies each blow out container with the vaporized material with a carrier gas, to a piping system of other blow out container. The use efficiency of the organic EL material is improved by supplying the blow out containers with the organic EL material from the single material container section by switching.