| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve a problem wherein a suction part may come off a supporting part when supplying compressive fluid from a suction passage to wash a suction face because ventilation resistance of a vacuum chuck is high. <P>SOLUTION: This vacuum chuck 1 is constituted in such a way that a suction part 2 formed by a porous body using ceramics and provided with the suction face 2b sucking a plate-like body is joined with the supporting part 3 formed by a compact substance body of ceramics, the supporting part 3 is provided with the suction passage 3a formed toward a joint face with the suction part 2 and a supporting part side groove 3e formed on the joint face and opening the suction passage 3a, and the suction part 2 is provided with a suction part side groove 2c having a part overlapped on the supporting part side groove 3e formed on a joint face with the supporting part 3. This vacuum chuck 1 is constituted to have low ventilation resistance and high rigidity. The vacuum suction device using this vacuum chuck 1 is used for a long period of time and has high reliability. <P>COPYRIGHT: (C)2008,JPO&INPIT |
