| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for filling a liquid material which has a degree of freedom in equipment constitution and which is capable of supplying a proper amount of a liquid material with no complicated control, and to provide an apparatus for filling a liquid material. SOLUTION: The method for filling the liquid material discharged from a discharging part to a gap between a substrate and a workpiece retained thereon utilizing capillary action includes a supplying step of supplying the liquid material from the discharging part to an edge of the workpiece, an image pickup step of picking up image by an image pickup means of an image at the edge of the workpiece in an area to be assumed that the liquid material supplied by the supplying step exudes by capillary action, a determination step of determinating whether the liquid material is filled to the whole area of the gap between the substrate and the workpiece by detecting the presence or absence of the liquid material between the edge of the workpiece from the picked-up image and a replenishment step to supplying the liquid material from the discharging part to the edge of the workpiece when determined as a defect. COPYRIGHT: (C)2008,JPO&INPIT
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