| 摘要 |
A projection objective provides a light path for a light bundle from an object field in an object plane to an image field in an image plane. The projection objective includes a first mirror (S 1 ), a second mirror (S 2 ), a third mirror (S 3 ), a fourth mirror (S 4 ), a fifth mirror (S 5 ), a sixth mirror (S 6 ), a seventh mirror (S 7 ), and an eighth mirror (S 8 ). The light path is provided via the eight mirrors, and in the light path exactly one intermediate image of the object field is provided.
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