| 摘要 |
A system for managing production of semiconductors that can improve or maximize productivity. In an embodiment, the system comprises: a host computer for outputting control signals to control semiconductor production processes; semiconductor production apparatuses each of which performs a corresponding semiconductor production process using the control signals output from the host computer; a conveyor for conveying a wafer carrier; and a conveyor monitoring apparatus for monitoring the conveyance of the wafer carrier, determining if the conveyor is delayed for more than the predetermined time, and displaying an error status to a remote operator.
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