| 摘要 |
A measuring apparatus measures a substrate on which a registration mark is formed. The measuring apparatus includes an acquisition unit which acquires the edge interval information of an image of the registration mark sensed under a measurement condition which is changed to make the edge interval of the image of the registration mark have an extreme value corresponding to a different focus position of a projection exposure apparatus, and a calculation unit which calculates a defocus value on the basis of the edge interval information of the image of the registration mark sensed under each measurement condition.
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