发明名称 Hologram and Method of Manufacturing an Optical Element Using a Hologram
摘要 A method of manufacturing an optical element ( 5 ) comprises testing an optical surface ( 3 ) of the optical element, using an interferometer 1 a directing measuring light ( 23 a) onto the optical surface wherein the measuring light traverses two successive holograms ( 44, 48 ) disposed in the beam path of the measuring light upstream of the optical surface.
申请公布号 US2008137090(A1) 申请公布日期 2008.06.12
申请号 US20060795598 申请日期 2006.01.20
申请人 CARL ZEISS SMT AG 发明人 HETZLER JOCHEN;BEDER SUSANNE;FELDMANN HEIKO
分类号 G01B9/021;G01B11/24 主分类号 G01B9/021
代理机构 代理人
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