| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a tape expanding device for arranging and maintaining predetermined intervals among devices by expanding an adhesive tape to which wafers divided into individual device are adhered. <P>SOLUTION: The tape expanding device arranges the predetermined intervals to the devices by expanding an adhesive tape and maintaining the intervals. The device includes a frame holding means 31 for holding an annular frame 3, a pressing member 40 that is smaller than an internal diameter of the annular frame 3 and is larger than an external diameter of the wafer, a tension applying means provided with a pressing member 40 and a transferring means for relatively moving the frame holding means 31 in the axial direction, a first ring 51 supported removably by the pressing member 40 with an internal diameter larger than the external diameter of the wafer 10, a second ring 52 having an internal diameter a little larger than the external diameter of the first ring 51 and having an external diameter smaller than the internal diameter of the annular frame 3, and a ring engaging means for engagement the first ring 51 and the second ring 52 by holding therebetween the adhesive tape. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
