| 摘要 |
PROBLEM TO BE SOLVED: To shorten any unbalanced portion of the deposit when changing the deposit by making a valve for controlling the plating deposit highly responsive. SOLUTION: Compressed air from a compressor is stored in a receiver tank, and the compressed air is fed to a nozzle header via a main pipe and a branched pipe. The original pressure of the receiver tank, the primary pressure of the main pipe and the secondary pressure of the branched pipe are controlled by the PIC control so as to be the respective set values. The pressures of respective secondary pressure meters provided on one side and the other side of a steel plate are averaged to determine whether or not the absolute value of the difference between the average value and the set value is equal to the set value X or larger than that. If the step is NO, the PIC control is continued. If YES, the PIC control is terminated. The valve opening to the pressure value in the step is obtained based on the relational line of the valve opening to the pressure stored in advance for each valve, and the signal is output to a drive source of each valve so as to reach the obtained valve opening. COPYRIGHT: (C)2008,JPO&INPIT
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