| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope of simple constitution capable of detecting exactly a sample surface, and an excitation method for exciting a cantilever array. SOLUTION: In this scanning probe microscope, an optical lever incident light 67 is made to get incident on all the faces of backfaces of a large number of cantilevers 64 via a reflecting mirror and a reflection preventive film 65, and the micro irregularity of a sample is detected as a brightness change, by an imaging device 70 for imaging displacements of the large number of cantilevers 64 due to an optical lever, with reflected lights 68 from the backfaces of the large number of cantilevers 64. COPYRIGHT: (C)2008,JPO&INPIT
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