| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of producing RF powder that has the characteristics used as the RF powder (powdery body), made of a large amount of particles formed collectively, and can surely separate a number of RF powder particles from one wafer with a high yield for extraction. <P>SOLUTION: By the method of RF powder, the RF powder is made of a large number of particles 11a, where one particle 11a includes a substrate 12 and a magnetic field coupled circuit element 15. The method has a process S11 for manufacturing a large number of antenna circuit elements 39 on a wafer 40; a gas-dicing process S13 for forming a kerf, at a position for separating a magnetic field coupled circuit element with the wafer; a protective film formation process S14 for covering the periphery of the magnetic field coupled circuit element with a protective film; a reinforcement process S15 for sticking a reinforcing plate with an adhesive sheet; a grinding process S16 for grinding the back of the wafer up to the kerf; and a separation process S17 for removing the reinforcement plate to separate a circuit element. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
