| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of discriminating surface foreign matter, back foreign matter, inside foreign matter and a defective pixel with less inspection process time than hitherto. SOLUTION: This inspection device 100 is equipped with a surface foreign matter detection part 122 for detecting a domain corresponding to the surface foreign matter; a defect candidate detection part 123 for detecting a domain corresponding to some of the surface foreign matter, the back foreign matter, the inside foreign matter and the defective pixel; and a defect portion specification part 125 for specifying a portion where some of the back foreign matter, the inside foreign matter and the defective pixel exists on a liquid crystal panel on reference to the detected domain. The inspection process time can be reduced, because an image processing part 120 including a defective pixel determination part 127 and a back foreign matter determination part 128 is required only discrimination a defect portion corresponding to some of the back foreign matter, the inside foreign matter and the defective pixel. COPYRIGHT: (C)2008,JPO&INPIT
|
