摘要 |
A connecting tape made of insulating material is adhered between a stage unit 21 and a stage unit 22 . The stage units 21 and 22 form united stage units by that. Therefore, edge parts 211 and 221 of the stage units 21 and 22 are bound by the connecting tape 41 and of which movements are restricted. The united stage units 21 and 22 are securely supported by support units 31 and 32 and support units 33 and 34 . As a result, number of the support units is reduced and inner lead 12 consumed. |