发明名称 MULTIPLE INLET ABATEMENT SYSTEM
摘要 <p>A method of operating an electronic device manufacturing thermal abatement system is provided, including: flowing a gaseous effluent through an inlet into a thermal abatement reaction chamber; abating the effluent; flowing the abated effluent through an outlet out of the thermal abatement reaction chamber; using a pressure sensor to measure an inlet pressure; using the same pressure sensor to measure an outlet pressure; wherein the pressure sensor sequentially measures the inlet pressure and the outlet pressure; determining the difference between the inlet pressure and the outlet pressure; and if the difference between the inlet pressure and the outlet pressure exceeds a pre-determined pressure, diverting the flow of effluent away from the inlet. Numerous other aspects are provided.</p>
申请公布号 WO2008070096(A1) 申请公布日期 2008.06.12
申请号 WO2007US24867 申请日期 2007.12.05
申请人 APPLIED MATERIALS, INC.;LOLDJ, YOUSSEF, A.;GELO, MIROSLAV;DIAZ, MANUEL;CRAWFORD, SHAUN 发明人 LOLDJ, YOUSSEF, A.;GELO, MIROSLAV;DIAZ, MANUEL;CRAWFORD, SHAUN
分类号 B01D45/00;B01J19/00 主分类号 B01D45/00
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