| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor device with its piezoresistances protected even in the occurrence of electrostatic discharge to lower failure frequency. SOLUTION: A sensor body 2 is provided with a detection circuit 7 comprising the piezoresistances R1 to R4 to connect the piezoresistances R1 to R4 and electrodes 9 to 12 by a wiring part 13 comprising a p-type low resistance part. Further, the sensor body 2 is provided with an n-type low resistance part 15 in contact with the wiring part 13 to form zener diodes D1 to D4 at these pn junction portions while forming a zener diode D5 also at a mass part 5. The zener diodes D1 to D5 are parallel connected to the piezoresistances R1 to R4 to form a protection circuit 14. This makes it possible to dissipate electric charges due to a high voltage by using the zener diodes D1 to D5 when the high voltage acts on the piezoresistances R1 to R4. COPYRIGHT: (C)2008,JPO&INPIT
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