| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure-resistant sensor in which a high-pressure fluid hardly intrudes inside to cause the degradation of characteristics of a sensor element in a high-pressure environment. SOLUTION: The pressure-resistant sensor is provided with a ceramic substrate 1 having both a terminal 1b for element connection and a terminal 1a for external connection connected to each other via an inner conductor 10; a sensor element 3 mounted to the surface of the ceramic substrate 1 and connected to the terminal 1b for element connection; and an insulator 2 provided in such a way as to cover the sensor element 3 and the terminal 1b for element connection. The inner conductor 10 has a bent part 10a and is drawn into the ceramic substrate 1. A high-pressure fluid intruding inside through the inner conductor 10 is shielded by the inner conductor 10 drawn inside the ceramic substrate 1 and hardly intrudes into the part of the sensor element 3. COPYRIGHT: (C)2008,JPO&INPIT
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