PLANAR OPTICAL CIRCUIT COMPONENT AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To accurately fix an optical waveguide circuit substrate or a substrate-attached optical component on a holding substrate through an adhesive.

SOLUTION: The optical waveguide circuit substrate 101 includes a clad 103 which is formed on a planar substrate 104 in a manner surrounding a core 102 and its periphery, bearing a warp by the difference of a thermal expansion coefficient in the planar substrate 104, the core 102, and the clad 103. The holding substrate 120 has an adhesive face 122, and is provided on both ends with a reference face 121 that is higher by one step than the adhesive face 122. The reference face 121 is arranged at two places or at three places forming vertexes of a triangle on the holding substrate 120. The optical waveguide circuit substrate 101 is fixed in close contact with the reference face 121 of the holding substrate 120. A proper amount of adhesive 114 is applied to the adhesive face 122 which is a difference-in-level face situated in a comparatively shallow position in view from the reference face 121 of the holding substrate 120 and then, the adhesive 114 is filled between the optical waveguide circuit substrate 101 and the adhesive face 122, thereby fixing the optical waveguide circuit substrate 101 and the holding substrate 120.

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