| 摘要 |
An optical measurement device for determining at least two parameters of a measurement location of a surface of a workpiece positioned in a known coordinate system by a workpiece support is described. The device comprises a first light source providing a first measurement beam at a first wavelength and a second light source providing a second measurement beam at a second wavelength. The device also comprises a beam steering system positioning the first and second measurement beams to be collocated on the surface of the workpiece. Further, the device comprise a first imaging system, detecting the incoming position of the first measurement beam and an optical receiving system, detecting the incoming position of the second measurement beam.
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