发明名称 |
METHOD AND APPARATUS FOR CATHODIC ARC ION PLASMA DEPOSITION |
摘要 |
A method and apparatus for depositing a coating material on a surface of a substrate by an ion plasma deposition process using a hollow cathode is disclosed. The cathode may be a substantially cylindrical hollow cathode. A plasma arc is formed on the outer circumference of the cathode to remove coating material from the cathode, which is then deposited on a surface of a substrate. An internal arc drive magnet is contained within the hollow bore of the cathode and cooling is provided to the magnet during operation.
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申请公布号 |
US2008138529(A1) |
申请公布日期 |
2008.06.12 |
申请号 |
US20060609078 |
申请日期 |
2006.12.11 |
申请人 |
GE GLOBAL RESEARCH CENTER |
发明人 |
WEAVER SCOTT ANDREW;CARTER WILLIAM THOMAS;MARRUSO PAUL MARIO |
分类号 |
C23C4/08 |
主分类号 |
C23C4/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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