发明名称 |
MICROSCOPE PROBE HAVING AN ULTRA-TALL TIP |
摘要 |
A microscope probe including a coaxial tip and a coplanar waveguide (CPW) formed on a silicon substrate is provided. The coaxial tip includes a tip shaft and a tip nib formed from the silicon substrate with the tip nib extending from the tip shaft opposite the silicon substrate. The tip shaft includes a first layer of a first conductive material formed over the silicon substrate, a second layer of an insulating material formed over the first layer, and a third layer of a second conductive material formed over the second layer. The tip nib includes the first layer of the first conductive material formed over the silicon substrate and exposed from the second layer and the third layer of the tip shaft. The CPW includes a center conductor formed from the first layer of the first conductive material and a first and a second outer conductor formed from the second layer of the second conductive material.
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申请公布号 |
US2008135749(A1) |
申请公布日期 |
2008.06.12 |
申请号 |
US20060608456 |
申请日期 |
2006.12.08 |
申请人 |
WISCONSIN ALUMNI RESEARCH FOUNDATION |
发明人 |
VAN DER WEIDE DANIEL WARREN;WANG YAQIANG |
分类号 |
B32B3/00;G01Q60/06;G01Q60/22;G01Q60/38 |
主分类号 |
B32B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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