METHOD AND SYSTEM FOR DETERMINING A CRITICAL DIMENSION OF AN OBJECT

摘要

The present invention includes systems and method of measuring a critical dimension of an object. The system of the present invention includes a multiwavelength interferometric imaging system having an image receiver that is adapted to receive reflected light and calculate a critical dimension of an object in response thereto. The system can also include a gage block defining a known dimension that is disposed at a predetermined distance from the multiwavelength interferometric imaging system. The gage block can define a surface that at least partially reflects incident light, and can be adapted to hold the object in a predetermined position during an imaging operation. During the imaging operation at least a portion of the light incident on the image receiver is reflected from the gage block, thereby allowing the image receiver to calculate a critical dimension of the object in response to the received image.