PATTERN FORMING METHOD AND PATTERN FORMING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a pattern forming method by which a pattern to be formed on a substrate while heating the substrate is highly accurately formed on a desired position.

SOLUTION: A stage 23 is movable along the Y-arrow direction and the opposed Y-arrow direction every 0.5 μm. An ejection timing signal is corrected based on the expansion degree of a mother sheet 4M due to heating. Because the landing position of a droplet from a nozzle is corrected every 0.5 μm based on the expansion degree of the mother sheet 4M, the droplet is landed on a required position in a divided area even when the mother sheet 4M is expanded.

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