| 摘要 |
A chemical liquid supplying apparatus capable of discharging chemical liquid with high accuracy and monitoring a leakage of an incompressible medium from a region between a piston and a cylinder is provided. A pump has a flexible tube for partitioning a pump chamber and a drive chamber, and the incompressible medium is supplied to the drive chamber by the piston reciprocating within a cylinder hole of the cylinder. A first bellows cover for forming a first seal chamber is provided between a large-diameter piston portion and the cylinder, and a second bellows cover for forming a second seal chamber is provided between a small-diameter piston portion and the cylinder. To detect pressure of the incompressible medium enclosed in the seal chambers, a seal-chamber pressure sensor is attached to the cylinder, and a deterioration degree of seal members is determined by detecting the pressure.
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