An array of MEMS devices is formed on a planar substrate having in each of a plurality of annular regions or sectors a plurality of MEMS mirrors of substantially identical structure, wherein the MEMS mirrors in each region have an identical pre-tilt. The pre-tilt is achieved by embedding each dual-axis tiltable mirror within a pre-tilted microplatform or gimbal. In a specific embodiment, one microplatform of a preselected pre-tilt is provided for each micromirror and an underlying electrode is provided having a shape conforming with the pre-tilt. In a specific embodiment, the annular regions are contiguous elliptical or ovoidal regions. By pre-tilt, it is meant that the rest state or nonactuated state of the micro-mirror is such that a reflected beam from a fixed source is directed to the center of a target array.
申请公布号
WO2008070764(A2)
申请公布日期
2008.06.12
申请号
WO2007US86616
申请日期
2007.12.06
申请人
GLIMMERGLASS NETWORKS, INC.;STAKER, BRYAN, P.;FERNANDEZ, ANDRES;KINDWALL, ALEXANDER, P.;OWENS, WINDSOR, E.
发明人
STAKER, BRYAN, P.;FERNANDEZ, ANDRES;KINDWALL, ALEXANDER, P.;OWENS, WINDSOR, E.