| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method capable of correcting the error inherent in a laser beam machining device, and machining a product with high precision. <P>SOLUTION: The laser beam machining method for forming a predetermined pattern having repeatedly same shape on a workpiece by using laser beam, comprises a step of forming the pattern on the workpiece based on the pattern date, a step of setting representative points in blocks formed in the workpiece and configuring a microcell, and measuring positions of representative points, a step of respectively correcting positions of representative points based on measured position date of representative points, a step of measuring dimension of blocks formed in the workpiece, and a step of correcting respectively dimension of blocks based on the measured dimension of blocks. Each of corrected and deformed block is arranged at each position of representative point corresponding to the corrected dimension of the block. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
