| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface condition inspecting apparatus capable of highly precisely and speedily detecting a rough surface having a roughness of a degree of tens of microns sufficiently larger than the wavelength of incident light and a prescribed area or larger as a rough surface as the surface of an object. SOLUTION: The surface condition inspecting apparatus comprises a light source, a deflector for deflecting light from the light source, a scanning optical system for guiding light defected at the deflector to a surface to be inspected, and a detector for detecting part of diffracted light generated from the surface to be inspected when the surface to be inspected is scanned in a main scanning direction with light defected at the deflector. The detector is installed in such a way that its detection opening for detecting the diffracted light may be in parallel with the main scanning direction and constituted in such a way as to adjust a detection angle of the detection opening to the surface to be inspected according to relative changes in a diffraction distribution of diffracted light generated on the basis of a surface roughness of the surface to be inspected within a sub-scanning cross section. COPYRIGHT: (C)2008,JPO&INPIT
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