| 摘要 |
This invention relates to organometallic precursor compounds represented by the formula i-PrN-Ta(NR<SUB>1</SUB>R<SUB>2</SUB>)<SUB>3 </SUB>wherein R<SUB>1 </SUB>and R<SUB>2 </SUB>are the same or different and are alkyl having from 1 to 3 carbon atoms, provided that (i) when R<SUB>1 </SUB>is ethyl, then R<SUB>2 </SUB>is other than ethyl and (ii) when R<SUB>2 </SUB>is ethyl, then R<SUB>1 </SUB>is other than ethyl, and a method for producing a film, coating or powder from the organometallic precursor compounds.
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