发明名称 POSITIONING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
摘要 A positioning apparatus includes a stage base, a stage moving along a surface of the stage base, a cable having one end connected to the stage, and a straightening structure configured to straighten air currents around the cable. The straightening structure is provided to at least one of the stage and the cable.
申请公布号 US2008136078(A1) 申请公布日期 2008.06.12
申请号 US20070929375 申请日期 2007.10.30
申请人 CANON KABUSHIKI KAISHA 发明人 HAMAYA ZENICHI
分类号 B23Q1/25 主分类号 B23Q1/25
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