| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a liquid droplet ejection head, in which the liquid droplet ejection heads (particularly liquid droplet ejection heads with a large number of thick lamination layer) can be individualized in a desired size without any burden applied to a dicing blade. SOLUTION: In the manufacturing method for the liquid droplet ejection head, a substrate with a plurality of the liquid droplet ejection heads formed by layering a plurality of substrates with parts for ejecting liquid droplets formed therein is subjected to dicing work to separate to each liquid droplet ejection head. The method includes a step of forming dicing auxiliary slots 67 with recesses wider than a desired dicing width to a part subjected to dicing work of an electrode substrate 10 which is the substrate of the most front layer before dicing work. COPYRIGHT: (C)2008,JPO&INPIT
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