| 摘要 |
A micropump includes a body ( 10 ) of semiconductor material, accommodating fluid-tight chambers ( 32 ), having an internal preset pressure, lower than atmospheric pressure. The fluid-tight chambers ( 32 ), sealed by a diaphragm ( 35 ) that can be electrically opened, are selectively openable using a first electrode ( 37 ) and second electrodes ( 38 ), accommodating between them portions of the diaphragm ( 35 ).
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