TRIMMING ELEMENT AND SENSOR ON A SINGLE CHIP

摘要

An integrated circuit chip has a substrate, an acoustic wave sensor, and a trimming element. The acoustic wave sensor is formed on the substrate, the trimming element is formed on the substrate, and the trimming element is coupled to the acoustic wave sensor so as to trim the acoustic wave sensor when the trimming element is adjusted. The trimming element, for example, may be a trimming capacitor.