发明名称 |
METAL AMINOTROPONIMINATES, BIS-OXAZOLINATES AND GUANIDINATES |
摘要 |
<p>Metal aminotroponiminates, metal bis-oxazolinates and metal guanidinates are described, as well as ligand precursors of such compounds, and mixed ligand barium and strontium complexes suitable for chemical vapor deposition, atomic layer deposition, and rapid vapor deposition processes. Such metal compounds are useful in the formation of thin metal films on substrates, e.g., in chemical vapor deposition, atomic layer deposition or rapid vapor deposition processes. The substrates formed have thin film monolayers of the metals provided by the precursors.</p> |
申请公布号 |
WO2008069821(A1) |
申请公布日期 |
2008.06.12 |
申请号 |
WO2006US62713 |
申请日期 |
2006.12.29 |
申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC.;CAMERON, TOM;XU, CHONGYING;CHEN, TIANNIU;STENDER, MATTHIAS |
发明人 |
CAMERON, TOM;XU, CHONGYING;CHEN, TIANNIU;STENDER, MATTHIAS |
分类号 |
C07F15/06 |
主分类号 |
C07F15/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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