Sputter deposition of molybdenum layers,申请号EP20070010658-传众专利搜索

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发明名称	Sputter deposition of molybdenum layers
摘要
申请公布号	EP1862563(A3)	申请公布日期	2008.06.11
申请号	EP20070010658	申请日期	2007.05.30
申请人	WUERTH SOLAR GMBH & CO. KG	发明人	MENNER, RICHARD;OERTEL, MIKE;SPRECHER, BERND;DIMMLER, BERNHARD;BAUER, TINO
分类号	C23C14/14	主分类号	C23C14/14
代理机构		代理人
主权项
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