PROCESS FOR PRODUCING 3-DIMENSIONAL MOLD, PROCESS FOR PRODUCING MICROFABRICATION PRODUCT, PROCESS FOR PRODUCING MICROPATTERN MOLDING, 3-DIMENSIONAL MOLD, MICROFABRICATION PRODUCT, MICROPATTERN MOLDING AND OPTICAL DEVICE

摘要

A process for producing a 3-dimensional mold, including irradiating a resist layer of a processing object having the resist layer made of an organopolysiloxane on a substrate with an electron beam, and developing, by thermal desorption treatment, the resist layer after the irradiation with an electron beam to form protrusions and depressions in the resist layer; a process for producing a microfabrication product by using the 3-dimensional mold; a process for producing a micropattern molding by using the 3-dimensional mold or the microfabrication product; and a 3-dimensional mold, a microfabrication product and a micropattern molding which are finely formed by these production processes, as well as an optical device.