| 摘要 |
A lift pin and a robot arm are provided to protect a glass efficiently by dispersing the load of the glass and coupling a lift pin head and a body with a spring and to extend the contact surface of the lift pin and a glass supporting pin. A lift pin includes a head(63), a body(65), and a spring(64). The head divides a upper side(61) and a lower side(62). The upper side is contacted to a glass and is made of soft material such as rubber. The lower side is contacted to a spring and is made of hard material such as peek. The body has a pillar shape and is made of hard material such as stainless material. A groove is formed on the body. The head and the body are coupled each other at the groove. The spring is made of an elastic material and is mounted between the head and the body. A robot arm includes a supporting pin and an absorption pad. The supporting pin is made of soft material. The absorption pad fixes a substrate which is put on the supporting pin. |
